| Part Numbers | Manufacturer Name | Datasheet | Core Processor | Core Size | Speed | Connectivity | RAM Size | Number of I/O | Program Memory Size | Program Memory Type | EEPROM Size | Voltage - Supply (Vcc/Vdd) | Data Converters | Oscillator Type | Operating Temperature | Package / Case |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| ATMEGA64-16MUR | ATMEL CORP | AVR | 8-Bit | 16MHz | I²C, SPI, UART/USART | 53 | 64KB (32K x 16) | FLASH | 2K x 8 | 4K x 8 | 4.5 V ~ 5.5 V | A/D 8x10b | Internal | -40°C ~ 85°C | 64-VFQFN Exposed Pad | |
| ATMEGA64-16AUR | ATMEL CORP | AVR | 8-Bit | 16MHz | I²C, SPI, UART/USART | 53 | 64KB (32K x 16) | FLASH | 2K x 8 | 4K x 8 | 4.5 V ~ 5.5 V | A/D 8x10b | Internal | -40°C ~ 85°C | 64-TQFP | |
| ATMEGA64-16AU | ATMEL CORP | AVR | 8-Bit | 16MHz | I²C, SPI, UART/USART | 53 | 64KB (32K x 16) | FLASH | 2K x 8 | 4K x 8 | 4.5 V ~ 5.5 V | A/D 8x10b | Internal | -40°C ~ 85°C | 64-TQFP | |
| ATMEGA64-16MU | ATMEL CORP | AVR | 8-Bit | 16MHz | I²C, SPI, UART/USART | 53 | 64KB (32K x 16) | FLASH | 2K x 8 | 4K x 8 | 4.5 V ~ 5.5 V | A/D 8x10b | Internal | -40°C ~ 85°C | 64-VFQFN Exposed Pad | |
| ATMEGA64-16AC | ATMEL CORP | AVR | 8-Bit | 16MHz | I²C, SPI, UART/USART | 53 | 64KB (32K x 16) | FLASH | 2K x 8 | 4K x 8 | 4.5 V ~ 5.5 V | A/D 8x10b | Internal | 0°C ~ 70°C | 64-TQFP | |
| ATMEGA64-16AI | ATMEL CORP | AVR | 8-Bit | 16MHz | I²C, SPI, UART/USART | 53 | 64KB (32K x 16) | FLASH | 2K x 8 | 4K x 8 | 4.5 V ~ 5.5 V | A/D 8x10b | Internal | -40°C ~ 85°C | 64-TQFP | |
| ATMEGA64-16MC | ATMEL CORP | AVR | 8-Bit | 16MHz | I²C, SPI, UART/USART | 53 | 64KB (32K x 16) | FLASH | 2K x 8 | 4K x 8 | 4.5 V ~ 5.5 V | A/D 8x10b | Internal | 0°C ~ 70°C | 64-VFQFN Exposed Pad | |
| ATMEGA64-16MI | ATMEL CORP | AVR | 8-Bit | 16MHz | I²C, SPI, UART/USART | 53 | 64KB (32K x 16) | FLASH | 2K x 8 | 4K x 8 | 4.5 V ~ 5.5 V | A/D 8x10b | Internal | -40°C ~ 85°C | 64-VFQFN Exposed Pad | |
| ATMEGA64-16AJ | ATMEL CORP | AVR | 8-Bit | 16MHz | I²C, SPI, UART/USART | 53 | 64KB (32K x 16) | FLASH | 2K x 8 | 4K x 8 | 4.5 V ~ 5.5 V | A/D 8x10b | Internal | -40°C ~ 85°C | 64-TQFP | |
| ATMEGA64-16MJ | ATMEL CORP | AVR | 8-Bit | 16MHz | I²C, SPI, UART/USART | 53 | 64KB (32K x 16) | FLASH | 2K x 8 | 4K x 8 | 4.5 V ~ 5.5 V | A/D 8x10b | Internal | -40°C ~ 85°C | 64-VFQFN Exposed Pad |
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